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The built-in layer constraint definition oacMinConcaveEdgeLength specifies the minimum edge length in database units for an edge that is in a concave corner of a shape. The step pattern should be filled in if both edges of the step are less than the minimum edge length.
oacMinConcaveEdgeLength constraints should be used in conjunction with oacMinConvexEdgeLength and oacMinEdgeLength constraints to determine whether a shape with a step pattern is suitable for Optical Pattern Correction (OPC).
| Constraint type: | oaLayerConstraint |
| Value types: | oaIntValue |
| Database types: | oaDesign, oaTech |
| Object types: | oaAppObject |
The following value types are supported by this constraint:
This oaIntValue represents the minimum concave edge length in database units.
Units: DBU
The following parameters are supported by this constraint:
| Name | Value Type | Units | Default | Description |
|---|---|---|---|---|
| lengthSum oacLengthSumConstraintParamType |
oaIntValue | DBU | None |
When the lengthSum parameter is specified, the oacMinConcaveEdgeLength constraint does not apply if the sum of the consecutive edges shorter than the minimum edge length value is less than value of the lengthSum parameter. |
Edge length constraints are used to increase the probability that OPC techniques can be used on the geometry to address the lithography distortions that are created during manufacturing.
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